화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2008년 가을 (10/09 ~ 10/10, 일산킨텍스)
권호 33권 2호
발표분야 액정/LCD 재료
제목 Fabrication of Micro to Nanolithography Using Highly Periodic Smectic Liquid Crystal Defects
초록 The formation of perfect long-range order by soft building blocks is one of the most exciting interdisciplinary research areas in current materials science and nano-biotechnology. Here, we show perfect surface ordering of toric focal conic domains (TFCDs) with feature size of submicrometer over milimeter-scale area, which can be formed by smectic liquid crystals and a successful route for suitable surface treatment. The highly regular liquid crystal defect domains are several micrometers apart with nanometer dimple structures in the center of domain and hexagonally ordered with a single structure through large area. The domain patterns are molded by UV-curable polymers and transferred directly to another substrate by using micro contact printing technique. This method has significant advantages over existing approaches to lithographic applications that this is easy to fabricate, generate long-range surface ordering with millimeter-scale, need very short time to form periodic arrays.
저자 정희태1, 김윤호1, 윤동기2, 정현수1
소속 1KAIST, 2삼성전자 반도체 총괄
키워드 Lithography; Liquid Crystal; Large area
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