화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2008년 봄 (04/10 ~ 04/11, 컨벤션 뷰로(대전))
권호 33권 1호
발표분야 기능성 고분자
제목 Microlithography using a 300-keV Ion Implanter
초록 Thin polymer films were prepared by spin-coating of polymer solutions on a silicon wafer and baking. Ion irradiation was carried out with a 300-keV Ion implanter. The irradiated films were baked and developed to generate polymer patterns. The irradiated films were characterized by using FT-IR, XPS, and SEM. The well defined 40 μm square patterns were obtained.
저자 최재학1, 이병민1, 권호제1, 김동기1, 정찬희1, 이정수1, 홍성권2, 노영창1, 서동학3
소속 1한국원자력(연), 2충남대, 3한양대
키워드 microlithography; ion implanter; pattern; polymer
E-Mail