화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2007년 가을 (10/26 ~ 10/27, 한국과학기술원)
권호 13권 2호, p.2146
발표분야 열역학
제목 Phase Behavior of Amine Mixture in Supercritical Carbon Dioxide
초록 Cloud point of the amine mixture with the fluoride group surfactant in supercritical carbon dioxide has been investigated. Amine mixture was used as additives for the supercritical carbon dioxide, because only CO2 could not remove completely photo resist used for semiconductor manufacturing process. The cloud point is a necessary factor for Supercritical CO2 Resist Removal (SCORR) process. The cloud points were measured using a high pressure variable-volume view cell. All systems exhibited a lower critical solution temperature (LCST) phase behavior and became one-phase in carbon dioxide in the range of 313.15 to 353.15 K at less than 30 MPa.
저자 원종우, 임종성, 한갑수
소속 서강대
키워드 cloud point; 클라우드 포인트
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