화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2019년 가을 (10/30 ~ 11/01, 제주국제컨벤션센터(ICC JEJU))
권호 23권 2호
발표분야 포스터_고분자
제목 Effective Total Organic Carbon Reduction using Surface-modified Magnetic Nanoarticles for the Ultrafine Photolithography
초록 Total organic carbon (TOC) including nitrogen-based organic compounds still remain in the ultrapure water (UPW). This TOC hinders the ultrafine photolithography process. In this work, we have developed an effective ion exchange material to reduce TOC in UPW. The ion exchange material is a micro-composite composed of magnetic (Fe3O4) nanoparticles (MNPs) and microbeads of cation exchange resin (CIER). MNPs were surface-modified with vinyl groups and then physicochemically adsorbed on the microbeads of CIER. Surface-modified MNPs and micro-composite were analyzed by XPS, SEM, TEM, FT-IR and TGA. A TOC reduction test using a micro-composite was also conducted.
저자 박지현1, 김보현2, 이강택3, 이선종1
소속 1한국생산기술(연), 2공주대, 3연세대
키워드 Surface modification; Total Organic Carbon; Magnetic Nanoarticles; ion exchange
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