화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2018년 가을 (10/10 ~ 10/12, 경주컨벤션센터)
권호 43권 2호
발표분야 고분자합성
제목 Synthesis and Thin Film Properties of Novel Photo-Crosslinked Polyimide Gate Insulators with Low Leakage Current Density
초록 For the preparation of a patterned polymer gate insulator, a novel method of photo-crosslinking the polymer insulator was developed. Firstly, the hydroxyl group containing polyimides (6FDA-6FHAB and DOCDA-6FHAB) were synthesized with a simple one step condensation polymerization using the monomers, 5,5'-(perfluoropropane-2,2-diyl)diisobenzofuran-1,3-dione (6FDA) , 5-(2,5-dioxytetrahydrofuryl)3-methly-3-cyclohexene-1-2-dicarboxylic anhydride (DOCDA), and 5,5'-(perfluoro propane-2,2-diyl)bis(2-aminophenol) (6FHAB). Synthesized polyimides were crosslinked by DPEHA as semi-IPN photo-crosslinking agent. Thin film properties of photo-crosslinked polyimides were characterized such as chemical structures, thermal stability, and capacitance, etc. Both crosslinked polyimide films showed low leakage current densities in MIM devices. Especially, 6FDA-6FHAB showed very low leakage current density less than 8.53x10-10 A/cm2 at 2 MV/cm. Detailed synthetic routes and conditions will be presented.
저자 기경민1, 김윤호2, 안 택1
소속 1경성대, 2한국화학(연)
키워드 polyimide; photo-crosslinking; gate insulator
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