||Research on localized surface plasmon resonance (LSPR) has recently attracted academia attention because of metal nano-structure having a size of nm can interact with electromagnetic waves and bring significant electromagnetic enhancement. In particular, Al nano structures exhibit properties at different UV wavelengths than metals such as gold and silver that have been researched. Devices with this LSPR characteristic can be applied to a sensor, purification, LED and so on. However, it is difficult to form metal nano structures below several tens of nanometers. In this study, we used nano-sized PS beads monolayer to make aluminum nano hole. For the first time, we coated PS nano beads monolayer on device. Then, by applying reactive ion etching to make the desired size. Al deposition on device and by removing PS nano-beads, we can easily obtain the Al nanostructures that have LSPR properties.