화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2014년 봄 (04/10 ~ 04/11, 대전 컨벤션센터)
권호 39권 1호
발표분야 기능성 고분자
제목 Flexible a-Si Thin-film Transistors via Laser Lift-off
초록 Fully functional electronic systems on flexible substrate have drawn keen attention due to the mechanical flexibility, excellent portability, and lightweight. In particular, Flexible display will open up fresh possibilities for the next big things in display. In this regard, thin film transistors (TFTs) formed directly on flexible substrate has been studied for past decade, including low-temperature solution processing, organic TFTs. These approaches, however, have shown inferior performance compared to TFTs on glass. To realize flexible TFTs with high performance, we introduced laser lift-off (LLO) technique to transfer TFTs onto flexible substrate. The fabricated TFTs on glass were successfully transferred onto flexible substrates by optimizing LLO process. The transferred TFTs have stable mechanical properties and maintained its electric performance on flexible substrate during bending state. The obtained results may open up new possibilities for realizing flexible display.
저자 이환건, 이건재
소속 한국과학기술원
키워드 flexible; TFTs; laser lift off; LLO
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