화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2014년 봄 (04/10 ~ 04/11, 대전 컨벤션센터)
권호 39권 1호
발표분야 기능성 고분자
제목 Fabrication and characterization of piezoelectric sensor with frequency selectivity for Self-powered Artificial Basilar Membrane
초록 In this research, we have developed the frequency selectable piezoelectric sensor to mimic the basilar membrane in human cochlear. Lead zirconate titanate (PZT) was coated on the sapphire wafer and transferred PZT only to the flexible and transparent substrate by laser lift-off process. An interdigitated electrodes (IDEs) were placed onto the top surface of the PZT. Trapezoidal shaped silicone membrane was used as the artificial basilar membrane for frequency selectivity. The fabricated PZT devices were attached onto the silicone membrane at the apex and the base position and measured its mechanical and piezoelectrical frequency response with a laser Doppler vibrometer and acoustic signal analyzer respectively. The result of this experiment shows that the PZT devices successfully separated low frequency at the base and high frequency at the apex from incoming white noise. The output voltage was approximately 200~250 ㎶ at 280 Hz and 10 ㎶ at 800 Hz.
저자 이현수, 이건재
소속 KAIST
키워드 cochlea; piezoelectric; artificial basilar membrane (ABM); laser Doppler vibrometer (LDV)
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