화학공학소재연구정보센터
Applied Surface Science, Vol.258, No.17, 6576-6582, 2012
Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD-DC PVD hybrid coating process
Amorphous carbon nitride (CNx) coatings were prepared on Si (100) substrates using a unique hybrid coating process with the combination of radio frequency plasma enhanced chemical vapor deposition (RF PECVD) and DC magnetron co-sputtering of graphite target at different N-2/Ar flow ratios. The structural properties (i.e. deposition rate, composition and bonding structure, residual stress, hardness, and surface morphology) of those CNx coatings were greatly affected by the N-2/Ar flow ratio. However, the friction behaviors of the CNx coatings in air and N-2 gas stream showed less dependency on the N-2/Ar flow ratio. The friction coefficients of CNx coatings sliding against AISI 52100 pins in air and N-2 gas stream were in the ranges of 0.17-0.19 and 0.33-0.42, respectively. The analyses of the worn surfaces from optical microscopy and Raman spectroscopy suggested that the friction behaviors of the CNx coatings are mainly controlled by the tribo-films on the pin surfaces other than the composition and bonding structure of the coatings. Specifically, the moderate friction coefficients (0.17-0.19) in air are attributed to the formation of a polymer-like carbon tribo-film, whereas the high friction coefficients (0.33-0.42) in N-2 gas stream are due to the directly sliding between CNx coating and steel pin surface. (C) 2012 Elsevier B. V. All rights reserved.