Applied Surface Science, Vol.258, No.6, 2206-2210, 2012
Growth, microstructure, and mechanical properties related to modulation period for ZrAlN/ZrB2 superlattice coatings
ZrAlN/ZrB2 multilayered superlattice coatings with modulation periods ranging from 20 nm to 60 nm were grown in magnetron sputtering chamber. X-ray diffraction (XRD), scanning electron microscopy (SEM) and nanoindention were employed to investigate the influence of modulation period on microstructure and mechanical properties of the multilayers. The sharp interfaces and nanoscale multilayered modulation were confirmed by SEM and XRD. The coating with modulation period of 40 nm and modulation ratio of 1:3 showed a marked polycrystalline structure with the strong mixture of ZrAlN (1 1 1), ZrB2 (0 0 1) and ZrB2 (1 0 1) textures. Meanwhile, it also possessed the highest hardness (36.4 GPa), elastic modulus (477 GPa), critical fracture load (76.48 mN), and lower residual stress, compared to those with other modulation periods and monolithic coatings. (C) 2011 Elsevier B.V. All rights reserved.