화학공학소재연구정보센터
Korean Journal of Chemical Engineering, Vol.17, No.4, 428-432, July, 2000
Hydrothermal Preparation of BaTiO3 Thin Films
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In preparing BaTiO3 thin films under hydrothermal conditions, the effects of concentrations of nutrient and mineralizer, and reaction time on crystallinity, grain size, surface roughness, and film thickness were investigated. Experiments were performed in the ranges of 0.1-1.5 M BaCl2·2H2O or Ba(OH)2·8H2O and 0.1-1.5 M KOH with varying reaction time from 0.16 to 8 hours at 140℃. Bimodal dispersion of crystalline grains on the surface of BaTiO3 thin films was predicted through nucleation and crystal growth reaction. As the concentrations of nutrient and/or mineralizer increased, grain size of the thin film became smaller, but more uniform and compact. When 0.4M Ba(OH)2·8H2 was used with 1.0 M KOH, a reaction time longer than 4 hours was required in order to fabricate BaTiO3 thin films.
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