화학공학소재연구정보센터
Applied Surface Science, Vol.253, No.18, 7353-7359, 2007
The structure and tribological behaviors of CrN and Cr-Ti-N coatings
The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1I 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures. (c) 2007 Published by Elsevier B.V.