화학공학소재연구정보센터
Applied Surface Science, Vol.252, No.18, 6107-6110, 2006
Effect of primary oxygen ion implantation on SIMS depth profiling in glasses
The influence of the primary oxygen ion implantation on SIMS in-depth profiles in halide and chalcogenide glasses was examined. Various behaviours of particular profiles were generally explained in terms of the chemical affinity of analysed reactants and modifications of the glass structure induced by primary ions. (c) 2006 Elsevier B.V. All rights reserved.