화학공학소재연구정보센터
Applied Surface Science, Vol.252, No.5, 1266-1275, 2005
Spray pyrolysis deposition of YSZ and YSZ-Pt composite films
In the present paper procedures are described for spray pyrolysis deposition of YSZ films (0.1-30 mu m in thickness) with 8 or 15 mole % of YO1.5 on different substrates. Aqueous or ethylene glycol solutions of Y-Zr-citrates were used as starting material and O-2 as carrier gas. The crystal structure and the morphology of the films were studied. The optimal deposition and post-deposition annealing conditions were defined, taking into account the desired film thickness and characteristics. Substrate temperatures of 250 degrees C during the deposition followed by heating for 10 min to 400 degrees C after every spraying and to 590 degrees C after every three sprayings with final annealing at 590 degrees C for 2 h in static air atmosphere were found to be suitable for the production of dense, uniform and cracks-free films. (c) 2005 Elsevier B.V. All rights reserved.