화학공학소재연구정보센터
Applied Surface Science, Vol.212, 735-741, 2003
An investigation of sidewall adhesion in MEMS
Adhesion or stiction is a key problem in surface micromachining technology, affecting the reliability of most MEMS. To date, the quantitative analysis of the phenomenon has been limited to in-plane adhesion. Since many micromechanisms involve contacts between sidewalls, we have designed a microinstrument to measure sidewall adhesion. Here, we describe the design, modeling, results and problems encountered with this first generation of sidewall adhesion devices. (C) 2003 Elsevier Science B.V. All rights reserved.