화학공학소재연구정보센터
Applied Surface Science, Vol.208, 518-521, 2003
Laser deposition of shape-memory alloy for MEMS applications
We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (C) 2002 Elsevier Science B.V All rights reserved.