화학공학소재연구정보센터
Applied Surface Science, Vol.208, 352-357, 2003
UV picosecond laser-induced changes on chemical vapor deposited diamond surface investigated by photoelectric charge measurements and surface analysis
In this paper, we investigate UV picosecond laser-induced effects on undoped chemical vapor deposited (CVD) diamond surfaces as a function of irradiation time. Diamond films are negative electron affinity (NEA) emitters and contain defects (nondiamond phases). Surface analysis is performed before and after laser irradiation, in order to clearly demonstrate surface structural transformations. A diamond peak shift after pulsed laser irradiation is determined by micro-Raman analysis and correlated to stress variations in diamond. The post-irradiated diamond surface reactivity with ambient air is studied by X-ray photoelectron spectroscopy (XPS). XPS results show surface bonding modifications due to carbon-oxygen interaction enhanced by UV pulsed laser irradiation. (C) 2002 Elsevier Science B.V. All rights reserved.