화학공학소재연구정보센터
Applied Surface Science, Vol.197, 883-886, 2002
Laser ablation of iron oxide in various ambient gases
Iron oxide nano-particle aggregated films were prepared using excimer laser ablation technique by adopting off-axis configuration and gas condensation process. Sintered iron oxide (Fe2O3) targets were ablated in Ar, He, N-2, Ne and Xe by ArF excimer laser (193 nm). It was found that even in off-axis configuration the film thickness followed Gaussian distribution and film length, L-1, decreased exponentially with atomic mass of the rare gas. The thickness distribution was symmetrical in the transverse direction but asymmetrical in the longitudinal one, i.e. the maximum of film thickness was shifted towards the target from the geometrical center of the plume in all the gases tested but helium. The ablation rate was the highest in N-2 and O-2 as conceived from the thickness distributions. Our results for inert gases support findings of other research groups on the various abilities of ambient gases to confine an ablation plume. The film length decreases exponentially with the atomic mass of the rare gas but the data points for N-2 and O-2 lie far above the exponential fit. (C) 2002 Elsevier Science B.V. All rights reserved.