화학공학소재연구정보센터
Applied Surface Science, Vol.190, No.1-4, 428-436, 2002
Surface/interface issues in THz electronics
Basic THz elements are produced by standard semiconductor science and technology. Therefore, three main material systems are used. These are first of all semiconductors, for active and passive layer formation; metals, for interconnect and contact formation; and insulators, for passivation and isolation purposes. Additionally, these materials are structured in order to produce a device with desired dimensions and characteristics. Semiconductor surfaces, in particular suffer considerable chances during technological processing. Thus, surface and interface issues are essential here to be considered. Semiconductor-dielectric, semiconductor-metal, and semiconductor-semiconductor interfaces as well as surface effects for the case of GaAs are discussed in detail from the point of view of Schottky diodes and heterostructure-based devices for THz applications. (C) 2002 Elsevier Science B.V. All rights reserved.