화학공학소재연구정보센터
Applied Surface Science, Vol.189, No.3-4, 344-348, 2002
Structural control and combinatorial doping of titanium dioxide thin films by laser molecular beam epitaxy
Structural control of titanium dioxide, TiO2, thin films was achieved by the selection of appropriate substrates. The rutile phase of the TiO2 thin film was grown on alpha-Al2O3(0 0 0 1) substrate, while the anatase phase was on SrTiO3(0 0 1) and LaAO(3)(0 0 1) substrates. The crystallinity of the anatase films has been much improved by the use of the LaAlO3(0 0 1) substrate. The combinatorial doping with 3d transition metals in the TiO2 thin films was carried out for the rutile and anatase films in much shorter time than the conventional one-by-one process, leading to the discovery of transparent ferromagnetism in the Co-doped anatase film. (C) 2002 Elsevier Science B.V. All rights reserved.