화학공학소재연구정보센터
Applied Surface Science, Vol.169, 654-657, 2001
Making parabolic mirrors by electron-beam gun evaporation method with ion-assisted deposition
A spherical surface was modified to form a parabolic surface by the evaporation of Al2O3 films and an ion-assisted deposition process using a designed mask. The stress of the evaporated films was measured by aphase shifting Twyman-Green interferometer. Ion beam bombardment was proven to reduce the stress of Al2O3 films. The optimum ion beam voltage and ion beam current density for reducing the film stress were 300 V and 16 muA/cm(2) for Al2O3 films.