화학공학소재연구정보센터
Applied Surface Science, Vol.159, 540-543, 2000
Self-formed In0.2Ga0.8As quantum dot-like laser grown by metal organic chemical vapor deposition on Si substrate
We report the growth of self-formed InGaAs quantum dot (QD) and the fabrication of self-formed In0.2Ga0.8As QD-like laser on Si substrate by metal organic chemical vapor deposition (MOCVD). The dots are grown by Stransky-Krastanov (S-K) growth mode. The laser shows room temperature continuous wave (CW) light output with a threshold current density of 1.32 kA/cm(2) and a lasing wavelength of 854 nm.