화학공학소재연구정보센터
Applied Surface Science, Vol.156, No.1-4, 200-206, 2000
On the structural properties and optical transmittance of TiO2 r.f. sputtered thin films
Pure and doped TiO2 thin films were obtained by r.f. sputtering method. The samples were deposited onto glass and glass covered with indium tin oxide (ITO) substrates. Phase and surface morphology were investigated using X-ray diffraction (XRD) and scanning electron microscopy (SEM). The structure of TiO2 thin films is influenced by the substrate used and also by doping with Ce, Nb and Fe impurities. Consequently, the transmittance will also be modified.