Applied Chemistry, Vol.11, No.2, 606-609, November, 2007
플랙시블 염료감응형 태양전지 제작을 위하여 radio frequency 마그네트론 스퍼터링 증착법에 의해 증착된 indium zinc oxide 박막
Indium zinc oxide thin films deposited by radio frequency magnetron sputtering for fabrication of flexible dye sensitized solar cell
In this study, indium zinc oxide (In2O3-ZnO, IZO) thin films were prepared for the fabrication of flexible dye sensitized solar cell (DSSC) on polyethylene terephthalate (PET, 175 μm) substrate by radio frequency (rf) magnetron sputtering with variation of rf power, gas pressure and distance of target to substrate. Finally, the transmittance of IZO thin film exhibited more than 82% in the visible light region and the specific resistivity value as low as 3.7 x 10-4 Ω cm was obtained. In particular, the IZO films deposited in this work were prepared at room temperature without any high temperature annealing.