화학공학소재연구정보센터
Journal of the Korean Industrial and Engineering Chemistry, Vol.15, No.5, 499-502, August, 2004
핫 엠보싱 공정을 이용한 마이크로 구조물 복제를 위한 마스터 표면개질
Surface Modification with Self-assembled Monolayers for the Replication of Microstructures Using Hot Embossing Process
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초록
핫 엠보싱 공정을 이용한 마이크로 구조물의 성형에서 실리콘 마스터 표면에 anti-sticking layer를 형성하여 이형특성을 향상시킬 수 있다. Dodecyltrichlorosilane과 perfluorooctyl-1H,1H,2H,2H-trichlorosilane을 사용하여 self-assembled monolayer (SAM) 형성법으로 마스터 표면을 개질하였다. 두 가지 SAM을 형성시킨 마스터 표면의 접착력이 감소하였으며, 종횡비가 큰 마이크로 구조물 성형이 가능하였다. 마스터 표면의 SAM은 atomic force microcopy (AFM), contact angle analysis, electron microprobe analysis (EPMA), X-ray photoelectron spectroscopy (XPS) 등을 이용하여 분석하였으며, 핫 엠보싱 공정에서 이형특성을 관찰하였다.
During the replication of microstructures in polymers by hot embossing, interfacial forces between the master and polymers need to be reduced by an anti-sticking layer inorder to ensure a clean demolding process. This article presents a comparison of the dodecyltrichlorosilane (DDTS) and perfluorooctyl-1H,1H,2H,2H-trichlorosilane (FTCS) self-assembled monolayer (SAM) in terms of the ultra-thin film property and effectiveness as anti-sticking layers for the micro-structured master. Both type of SAMs have been evaluated in several ways, including atomic force microscopy (AFM), contact angle analysis (CAA), electron microprobe analysis (EPMA) and X-ray photoelectron spectroscopy (XPS). Successful anti-adhesion layer on the master is demonstrated under adequate solution reaction conditions.
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