화학공학소재연구정보센터
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol.368, 3769-3776, 2001
LC vision: The new application to silicon surface defects testing
The thin layers of oriented NLC applied on the surface under investigation as a free film can visualize through a polarizing microscope structural inhomogeneities and microrelief defects. On this basis a nondestructive method to study substrates quality has been developed, The results of defect detection on different silicon surfaces are discussed for the first time.