화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.18, No.4, 1184-1189, 2000
Real-time optical characterization of heteroepitaxy by organometallic chemical vapor deposition
Heteroepitaxy of GaP on Si(100) and GaAs(100) is investigated under organometallic chemical vapor deposition conditions using combined spectroscopic ellipsometry (SE) and non-normal-incidence reflectance-difference (-anisotropy) spectroscopy. Real-time monitoring greatly assists in identifying optimum starting surfaces for heteroepitaxy since prolonged exposure to PH3 results in roughening of Si(100) and GaAs(100) surfaces, in agreement with previous work. Real-time SE data of GaP on Si indicate that under our conditions GaP and Si interpenetrate as optically identifiable materials over the first 75 Angstrom, suggesting that either trimethylgallium or a reaction by-product can act as a catalyst for the formation of Si(lll) facets.