화학공학소재연구정보센터
Thin Solid Films, Vol.396, No.1-2, 97-102, 2001
Fabrication of perovskite-based Pb(Zn1/3Nb2/3)O-3 (PZN) thin films using charged liquid cluster beam
Charged nanodrops of precursor solutions are used to prepare very thin Pb(Zn1/3Nb2/3)O-3 (PZN) films with full perovskite phase on Pt/Ti/SiO2/Si substrates. PbTiO3 (PT) and BaTiO3 (BT) are added to stabilize the formation of the perovskite. structure. The effect of the various lead and zinc sources on the stabilization of the perovskite phase is investigated. When acetate group is used as a ligand for the lead and zinc sources, the perovskite phase can be stabilized in (1-x)PZN-xPT films at x = 0.7. However, with 2-ethylhexanote ligand the minimum PT content required to stabilize the perovskite phase in (1-x)PZN-xPT films is reduced to x=0.6. With a 5% BT addition in the 2-ethylhexanote precursor, the minimum PT content required to stabilize the perovskite phase is further reduced to approximately x=0.4 even in a film as thin as 3 mum in thickness.