화학공학소재연구정보센터
Journal of the Korean Industrial and Engineering Chemistry, Vol.12, No.7, 820-826, November, 2001
Plasma Display Panel용 순수 현상형 감광성 격벽 Paste 및 Photolithography 공정 특성
Water-developable Photosensitive Barrier Rib Paste for PDP and Photolithographic Process
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초록
PDP에 있어서 격벽(barrier rib)은 일정한 선폭과 높이를 가져 균일한 방전공간을 제공하고, 인접한 셀간의 전기적, 광학적 혼선(crosstalk)을 방지하는 역할을 한다. 이와 같은 역할을 수행하기 위해서 격벽의 요구사항은 균일성, 형상 정도, 낮은 아웃개성, 낮은 기공, 높은 종횡단비, 해상도 등이 뛰어나야한다. 본 연구에서는 고정세 대화면 PDP에 적합한 순수현상 감광성 격벽 paste의 formulation 및 이를 이용한 photolithography 공정 특성에 대해 조사하였다. 감광성 격벽 페이스트는 바인더 고분자인 히드록시프로필 셀룰로오즈를 3MMB 용매에 20 wt%로 용해한 다음 관능성 단량체로서 EB600/PETA=50/50 wt% 혼합물, 광개시제로서 HSP 188 및 격벽 분말을 도입한 다음 전체를 균일하게 분산시켜 제조하였다. 감광성 격벽 페이스트의 각 성분, 조성, 및 공정을 최적화하여 소성 후 높이 110 μm, 선폭 80 μm 및 핏치 420 μm 격벽 형상을 사진식각법으로 얻을 수 있었다.
Barrier ribs for the plasma display panel (PDP) are commonly utilized to have uniform height and width and to prevent optical crosstalk between adjacent cells. The basic requirements for such barriers are uniform height and shape, low outgassing rate and low porosity, high aspect ratio, fine resolution, and so on. In this study, an attempt was made to demonstrate the possibility of using a photolithography method in manufacturing the barrier ribs. The barrier rib paste was prepared by first dissolving hydroxypropyl cellulose in 3-methoxy-3-methyl butanol (3MMB), forming 20 wt% solution. To this solution, a mixture of EB600/PETA at 50/50 wt%, HSP 188 as the photoinitiator, and barrier rib powder were added. Then the mixture was throughly mixed in a three-roll mill. The effect of the component and concentration of photosensitive barrier paste on the photolithographic process was studied. After optimization of the paste formulation and photolithographic process, the resulting barrier ribs showed height of 110 μm, width of 80 μm and pitch of 420 μm.
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