화학공학소재연구정보센터
Thin Solid Films, Vol.327-329, 833-836, 1998
Molecular photopatterning with a two-dimensional network of polymer LB films
The preparation of preformed polymer Langmuir-Blodgett (LB) film which has a cross-linkable group and the formation of a two-dimensional network polymer LB film by the efficient cross-linking reaction in the LB film were described. N-Dodecylacrylamide copolymer containing a cross-linkable group, N-omega-acryloylundecyl-4-vinylpyridinium salt, forms a stable condensed monolayer and can be transferred onto a silicon wafer. On UV irradiation on the polymer LB film through a photomask in which fine patterns are figured, the fine patterns can be drawn clearly as the result of the formation of a two-dimensional network by efficient cross-linking of the linear polymer chain in LB film. The characterization of the LB film as a candidate of high-resolution resists was also investigated from the sensitivity measurement.