화학공학소재연구정보센터
Thin Solid Films, Vol.297, No.1-2, 84-87, 1997
Implanted Muon States in Porous Silicon
It is desirable to know the location and type of the hydrogen within the nanostructure of porous silicon (PS). Hydrogen is, however, very difficult to detect and locate with conventional spectroscopic techniques. The presence of hydrogen in bulk crystalline and amorphous silicon is well-known, and it can exist in the form of intrinsic hydrogen, implanted hydrogen or as an impurity. Muon studies of amorphous and bulk crystalline silicon suggest that there are two important states for muonium and hence hydrogen in silicon, termed the ’normal’ and ’anomalous’ sites. Normal muonium is generally described as being located at the centre of the tetrahedral cage site. The second state is anisotropic and is believed to lie at the centre of a stretched Si-Si bond. Here we report muon implantation of PS and this is discussed in terms of the nanostructure dimensionality.