화학공학소재연구정보센터
Thin Solid Films, Vol.281-282, 112-116, 1996
Electron-Beam-Induced Oxidation of Indium Particles Embedded in a Plasma Polymer Thin-Film Matrix
The microstructure of plasma polymer thin films containing embedded indium particles was determined by transmission electron microscopy. The size and shape of the embedded indium particles depend on the monomer (benzene, styrene) and the deposition procedures used for plasma polymerization and metal evaporation. Oxidation of the indium particles was induced by electron-beam irradiation in the electron microscope. By selected area electron diffraction and X-ray photoelectron spectroscopy analysis, it was demonstrated that the indium particles were oxidized to smaller In2O3 crystallites. This is in contrast with the covering of indium particles by an indium oxide shell during long-time storage in air or thermal annealing.