화학공학소재연구정보센터
Thin Solid Films, Vol.270, No.1-2, 33-36, 1995
Zinc-Oxide Thin-Films by the Spray-Pyrolysis Method
Undoped and In-doped ZnO thin films have been prepared on glass substrates from solutions of Zn(CH3CO2)(2) . 2H(2)O in a mixture of deionized water and isopropyl alcohol by spray pyrolysis. Their optical, morphological and structural qualities have been studied and the effect of the preparation conditions discussed. It was shown that the main factors determining the parameters of ZnO films are the growth temperature and the indium concentration. The growth temperatures of 625-675 K, indium doping levels of 1-1.5 at.% and precursor concentrations of 0.1-0.2 mol 1(-1) are preferable to achieve ZnO films with optical and structural qualities as required for solar cell applications.