화학공학소재연구정보센터
Journal of Crystal Growth, Vol.514, 124-129, 2019
Cost-effective selective-area growth of GaN-based nanocolumns on silicon substrates by molecular-beam epitaxy
In this paper, the selective-area growth (SAG) of GaN-based nanocolumns (NCs) on silicon (Si) has been investigated experimentally. A low-cost and facile method has been proposed and implemented to fabricate the SAG NCs, which contains the processes of nanosphere lithography (NSL) and plasma-assisted molecular beam epitaxy (MBE). SAG NCs grown by this method indicates a higher ability to modulate the NC distributions than those grown by the conventional patterned method. According to photoluminescence results, InGaN/GaN NCs grown on Si nanopillars produced by NSL and etching show the more uniform indium (In) distribution than those grown on the openings of patterned Si substrate. Furthermore, according to the kinetic processes during MBE growth, it is proposed that the SAG of NCs results from the combination of the shadow effect of Si nano-pillars and the growth suppression of titanium (Ti) film.