Thin Solid Films, Vol.673, 34-43, 2019
Numerical modelling of a compression test based on the 3D digital material representation of pulsed laser deposited TiN thin films
The approach to evaluate possibilities offered by the digital material representation (DMR) concept in application to numerical investigation of deformation inhomogeneities in pulsed laser deposited (PLD) thin films is presented within the work. Concepts of the DMR model as well as developed algorithms for statistical representation of typical morphologies of deposited thin films are described in detail. TiN/Si(100) films obtained by the PLD were selected as a case study for the investigation. Material properties of investigated layers were obtained through nanoindentation tests combined with the inverse analysis. TiN/Si(100) DMR were then incorporated into the finite element software and numerical model of the compression test was established to identify local inhomogeneities associated with thin films morphologies. Examples of obtained results presenting capabilities of the proposed approach are highlighted in the paper.