Current Applied Physics, Vol.19, No.3, 219-223, 2019
Multiple surface conduction channels via topological insulator and amorphous insulator thin film multi-stacks
Multi-channel Bi2Se3 thin films were grown by combining molecular beam epitaxy and atomic layer deposition. High-resolution transmission electron microscope images showed that c-axis oriented Bi2Se3 grew on amorphous Al2O3 even after multiple stacking. While the surface morphology degraded for the upper layers, each layer was electrically similar. The electrical transport measurements showed that the weak anti-localization effect was quantitatively enhanced upon increasing the number of Bi2Se3 channels. Our results provide a promising approach to exploit diverse combinations of layered topological insulator films vertically stacked with amorphous insulator films.