화학공학소재연구정보센터
Applied Surface Science, Vol.467, 1053-1058, 2019
Microscopic observation of catalytically etched channels and pits in MoS2 flakes
With a growing interest in two-dimensional transition metal dichalcogenide (TMD), etching the structure of TMD for further application is a challenge due to its thermal stability by a high melting point. Here, we report on diverse etched structures in MoS2 flakes based on the catalytic oxidation using a Co catalyst. After impregnated with a Co precursor, MoS2 flakes were oxidized in air by induction heating to obtain an etched structure. As a result, microscopic observation revealed that diverse etched structures in the shape of a channel and a pit were created in the MoS2 flakes. Especially, the catalytic etching by CoO nanoparticles produced two types of channels which have an angle of 120 degrees and 150 degrees respectively. Also, a pit with a depth of approximately 3 nm was found on the oxidized surface of MoS2 flakes. Our results open a new perspective to control the edge site of TMD flakes including S element as well as MoS2 flakes.