Applied Surface Science, Vol.475, 926-933, 2019
Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al2O3/organic-inorganic nanohybrid layers
In this work, we reported excellent plasma-enhanced atomic layer deposition (PEALD)-based Al2O3 /organicinorganic (O-I) nanohybrid gas barrier film which exhibits ultralow water vapor transmission rate (WVTR), high activation energy for permeation, high optical transmission in visible light and sufficient flexibility. The values of WVTR and activation energy for permeation of our PEALD-based Al2O3/O-I nanohybrid 4 pair gas barrier film are obtained to be 7.83 x 10(-5) g/m(2)/day (60 degrees C, 90% RH) and 103.10 kJ/mol via the electrical calcium test. Optical transmission in visible light is 96.14% and critical bending radius 7 mm-9 mm. Introduction of O-I nanohybrid layers between PEALD-based Al2O3 layers improved the properties of gas barrier films on anticorrosion, adhesion, and flexibility.
Keywords:Plasma enhanced atomic layer deposition (PEALD);Al2O3;Anticorrosion;Encapsulation;Nanoparticles;Sol-gel;Organic-inorganic nanohybrid