화학공학소재연구정보센터
Current Applied Physics, Vol.18, No.11, 1447-1450, 2018
Correlation between spin density and V-th instability of IGZO thin-film transistors
The electron spin resonance (ESR) detects point defect of the In-Ga-Zn oxide (IGZO) like singly ionized oxygen vacancies and excess oxygen, and get spin density as a parameter of defect state. So, we demonstrated the spin density measurement of the IGZO film with various deposition conditions and it has linear relationship. Moreover, we matched the spin density with the total BTS and the threshold voltage (V-th) distribution of the IGZO thin film transistors. The total BTS Delta V-th and the V-th distribution were degraded due to the spin density increases. The spin density is the useful indicator to predict V-th instability of IGZO TFTs.