화학공학소재연구정보센터
Journal of Applied Electrochemistry, Vol.45, No.7, 679-688, 2015
Modeling of through-mask electrochemical micromachining
A scheme of numerical modeling of through-mask electrochemical machining, which enables one to predict the shape and sizes of workpiece surface, is developed. The effect of mask parameters (a fraction of unprotected area, mask thickness and unprotected region width) on the distribution of an average current density over the workpiece surface is analyzed. The developed mathematic model and the calculated results can be used to design the operations of electrochemical micromachining with partial insulation of workpiece surface.