Thin Solid Films, Vol.570, 445-450, 2014
Deposition of fluorocarbon film with 1,1,1,2-tetrafluoroethane pulsed plasma polymerization
The fluorocarbon films were synthesized by radio frequency pulsed 1, 1, 1, 2-tetrafluoroethane plasma polymerization using various duty cycles. The deposition rates and water contact angles were examined for radio frequency pulsed plasma polymerized fluorocarbon films. The film surface properties were also determined by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy and scanning electron microscopy. For varying duty cycle from 100% to 10% in pulsed plasma process, the plasma polymerized film drastically changed the surface property. Specifically, it has been observed that modulated plasmas with the proper duty cycle of 10% lead to the formation of the super-hydrophobic film by static water contact angle value of 150 degrees. The surface properties of fluorocarbon films were determined as the Cassie state. In the transmittance, UV-VIS transmission spectra showed that these radio frequency pulsed plasma polymerized coatings were transparent in visible light region. By adjusting duty cycles in relation to radio frequency pulsed plasma polymerization, the hydrophobicity of the resulting thin fluorocarbon films could be tuned. (C) 2014 Elsevier B.V. All rights reserved.
Keywords:Fluorocarbon film;Pulsed plasma;1,1,1,2-Tetrafluoroethane;Plasma polymerization;Super-hydrophobic;Duty cycle