화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.11, No.12, 1042-1046, December, 2001
Co-22%Cr 합금박막의 자가정렬형 나노구조에 의한 자기적 물성
Magnetic Property Evolution of Co-22%Cr Alloy Thin Films with Self-Organized Nano Structure Formation
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Co-22%Cr alloy films are promising for high-density perpendicular magnetic recording media with their perpendicular anisotropy and large coercivity of 3000 Oe. We observed that a self organized nano structure(SONS) of fine ferromagnetic Co-enriched phase and paramagnetic Cr-enriched phase appears inside the grain of Co-Cr magnetic alloy thin films at the elevated substrate temperature after do-sputtering. We prepared 1000 \AA -thick Co-22%Cr films on 2000 \AA - SiO 2 /Si(100) substrates at the deposition rate of 100 \AA /min with substrate temperatures of 3 0 ? C , 10 0 ? C , 15 0 ? C , 20 0 ? C , 30 0 ? C , and 40 0 ? C , respectively. We employed a vibrating sample magnetometer(VSM) to measure the B-H loops showing the saturation magnetifation, coercivity, remanence in in- plane and out- of- plane modes. In- plane coercivity, perpendicular coercivity, and perpendicular remanence increased as substrate temperature increased, how-ever they decreased after 30 0 ? C slowly. Transmission electron microscope (TEM) characterization revealed that the self organized nano structure (SONS) appears at the elevated substrate temperature, which forms fine Co-enriched phases inside a grain, then it eventually affect the perpendicular magnetic property. Our results imply that we may tune the perpendicular magnetic properties with SONS obtained at appropriate substrate temperature.
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