화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.21, No.6, 334-340, June, 2011
잉곳 슬라이싱용 Saw Wire의 연삭마모에 미치는 인장특성과 미세조직의 영향
Effects of Tensile Properties and Microstructure on Abrasive Wear for Ingot-Slicing Saw Wire
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Saw wires have been widely used in industries to slice silicon (Si) ingots into thin wafers for semiconductor fabrication. This study investigated the microstructural and mechanical properties, such as abrasive wear and tensile properties, of a saw wire sample of 0.84 wt.% carbon steel with a 120 μm diameter. The samples were subjected to heat treatment at different linear velocities of the wire during the patenting process and two different wear tests were performed, 2-body abrasive wear (grinding) and 3-body abrasive wear (rolling wear) tests. With an increasing linear velocity of the wire, the tensile strength and microhardness of the samples increased, whereas the interlamellar spacing in a pearlite structure decreased. The wear properties from the grinding and rolling wear tests exhibited an opposite tendency. The weight loss resulting from grinding was mainly affected by the tensile strength and microhardness, while the diameter loss obtained from rolling wear was affected by elongation or ductility of the samples. This result demonstrates that the wear mechanism in the 3-body wear test is much different from that for the 2-body abrasive wear test. The ultra-high tensile strength of the saw wire produced by the drawing process was attributed to the pearlite microstructure with very small interlamellar spacing as well as the high density of dislocation.
  1. Moller HJ, Adv. Eng. Mater., 6, 501 (2004)
  2. Ng TW, Nallathamby R, Optic. Laser Tech., 36, 641 (2004)
  3. Pei ZJ, Xin XJ, Liu W, Int. J. Mach. Tool. Manufact., 43, 7 (2003)
  4. Bae CM, Nam WJ, Lee CS, Scripta Mater., 41, 605 (1999)
  5. Shipway PH, Wood SJ, Dent AH, Wear, 203-204, 196 (1997)
  6. Gomes MGMF, Almeida LH, Gomes LCFC, May IL, Mater. Char., 39, 1 (1997)
  7. Yang GH, Garrison Jr WM, Wear, 129, 93 (1989)
  8. Osara K, Tiainen T, Wear, 250, 785 (2001)
  9. Sunada H, Wadsworth J, Lin J, Sherby OD, Mater. Sci. Eng., 38, 35 (1979)
  10. Nakagawa AH, Thomas G, Metall. Mater. Trans., 16, 831 (1985)
  11. Zelin M, Acta. Mater., 50, 4431 (2002)
  12. Murakami M, Takanaga Y, Nakada N, Tsuchiyama T, Takaki S, ISIJ. Int., 48(8), 1467 (2008)
  13. Kim WJ, Kang N, Kim SJ, Do HH, Nam D, Cho KM, Korean J. Mater. Res., 21(4), 187 (2011)
  14. Rabinowicz E, Dunn LA, Russell PG, Wear, 4, 345 (1961)
  15. Trezona RI, Allsopp DN, Hutchings IM, Wear, 225-229, 205 (1999)
  16. Bhagavat S, Kao I, Int. J. Mach. Tool. Manufact., 46, 531 (2006)