Materials Science Forum, Vol.394-3, 487-490, 2001
Bimorph-type microactuator using TiNi shape-memory thin film
The shape memory behavior of a Ti-Ni film on a Si substrate was studied and compared with that of a Ti-Ni freestanding film. The shape memory thin film on the Si substrate exhibited a perfect shape memory effect, higher transformation temperatures and a smaller temperature hysteresis than those of the freestanding film. These characteristics can be explained by the thermal stress and strain caused by the difference in the thermal expansion between the film and the substrate.