화학공학소재연구정보센터
Materials Science Forum, Vol.363-3, 496-498, 2001
Investigation of stainless steel films sputtered on glass
The influence of the sputter atmosphere on glass supported magnetron sputtered stainless steel films was investigated using Positron Annihilation Lifetime Spectroscopy (PALS) and Doppler-Broadening Annihilation Radiation (DBAR) as well as Rutherford Backscattering (RDS), Integral Low Energy Electron Mossbauer Spectroscopy (ILEEMS), Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM).