Corrosion resistant microfluidic devices with Ti-lined structure were fabricated for hydrothermal synthesis of high purity metal oxide nanoparticles under high-temperature and high-pressure condition. Pr-doped Ca0.6Sr0.4TiO3 red phosphor nanoparticles without contaminations were continuously and safely synthesized using the devices at 673 K and 30 MPa within short residence time of 20 ms in spite of corrosive environment. The nanoparticles having an average particle size of 10 nm and a perovskite structure showed a strong red emission peak around 613 nm. (C) 2013 Elsevier B.V. All rights reserved.