화학공학소재연구정보센터
Applied Surface Science, Vol.307, 576-578, 2014
Thermal annealing effect on structural and magnetic properties of ZnFe204 thin films deposited by magnetron sputtering
Thin films of zinc ferrite (ZnFe204) were deposited on Si(1 1 1) substrates using radio frequency magnetron sputtering at room temperature. The effect of thermal annealing under vacuum with magnetic field on structural and magnetic properties of Zn ferrite films has been investigated as a function of post-annealed temperature. The saturation magnetization at room temperature was enhanced up to 256 emu/cm3 by annealing at relatively low temperature of 200 C and decreased at higher temperatures. The complex permeability p = p - i,u" values of the ferrite films as-deposited and annealed at 200 and 400 C were measured at frequency up to 4 GHz. These films exhibited better high-frequency properties, especially, the film annealed at 200 C had a large bt' of 16 and high resonance frequency fr of 1.48 GHz. The results showed that the Zn ferrite film annealed at 200 C could be used as core inductors in the electromagnetic devices. 2014 Elsevier B.V. All rights reserved.