화학공학소재연구정보센터
Applied Surface Science, Vol.268, 529-534, 2013
Mold-free fabrication of 3D microfeatures using laser-induced shock pressure
This paper reports on the fabrication of microfeatures on metallic foils using laser-induced shock forming without the assistance of micromold patterns. A mold-free laser shock forming technique, Flexible Pad Laser Shock Forming (FPLSF) has been developed and demonstrated to fabricate near-spherical micro-craters on thin copper foils through the laser-generated plasma shock inducing plastic deformation on the copper foil. It is found that the crater formation strongly depends on the laser energy fluence applied to ablate an ablative overlay which is on top of the copper foil for plasma shock generation. Microfeatures with deformation depth of 80 mu m to 130 mu m and radius of 485 mu m to 616 mu m were formed on 25 mu m thick copper foils for the laser fluence of 7.3 J/cm(2) to 20 J/cm(2) while using aluminum foil as the ablative overlay and silicone rubber as a flexible support instead of a micromold. Fabrication of crater arrays on copper foils was also demonstrated successfully. (C) 2013 Elsevier B.V. All rights reserved.