Thin Solid Films, Vol.520, No.13, 4219-4236, 2012
Atmospheric plasmas for thin film deposition: A critical review
An overview of the possibilities of atmospheric plasma for the deposition of inorganic and organic coatings is presented. Some particularities of the atmospheric discharges and their consequences on the synthesis of films are presented and discussed. 2012 Published by Elsevier B.V.
Keywords:Atmospheric plasma;Deposition;APECVD;Organic coatings;Inorganic coatings;Hybrid coatings;Plasma-polymerization