화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.4, 1266-1271, 2010
Investigation of the tribological behavior and its relationship to the microstructure and mechanical properties of a-SiC:H films elaborated by low frequency plasma assisted chemical vapor deposition
Amorphous hydrogenated silicon carbide (a-SiC:H) coatings are promising candidates for tribological applications in the mechanical and aeronautical industries. Alternately high values of hardness H (15